Emit PE

Process measurement automation that captures full data instantly and makes results consistent and reusable.

Process Measurement Automation

Emit PE is designed for semiconductor process engineers to automate TEM/SEM and CDSEM measurement and analysis. It reduces manual configuration, improves repeatability, and turns expensive experimental data into scalable, organization-level capability.

Product Highlights: Process Measurement Automation

A complete toolkit for semiconductor process measurement automation, from feature definition to measurement, visualization, and analysis.

Process feature measurement

Process Feature Measurement

  • Manual / automated critical dimension measurement
  • Single / multi-segment dimensions and stack thickness
  • Deep-learning auto dimension recognition
  • Horizontal / vertical alignment with arbitrary angles
Reference feature setup

Reference Feature Setup

  • Manual reference boundary / region setup
  • Auto reference feature extraction and recognition
  • Reference point placement and matching
  • Horizontal / vertical boundary setup and matching
CDSEM measurement

CDSEM Measurement

  • General CDSEM automated measurement toolkit
  • Line / Space / Via and other structures
  • T2T / E2E / T2L and more pattern metrics
  • LWR / LER / profile and EPE feature extraction
Automated process analysis

Process Analysis Automation

  • Multi-level complex component structure recognition
  • “Zero-setup” automated analysis configuration
  • Automated measurement & analysis recipes
  • Works with Emit PJ for project-level management

Process Development Execution Scenarios

From TEM/SEM measurement to collaboration and knowledge reuse, Emit PE removes manual bottlenecks and makes results consistent and fast.

Typical Scenario Typical Current State Emit PE
TEM/SEM Measurement
Time-consuming, sparse data
5–10 min / image, manually clicking 5–10 points.
Instant full data
Zero-setup automated measurement, >1000x faster.
Scale Calibration
Large calibration error, low efficiency
Manual fine alignment affects overall results.
Automatic calibration
Dedicated deep-learning model for fast, high accuracy.
Process Parameter Extraction
High expertise required, large errors
Manually set references and run multi-step measurement.
Process-specific auto parameter measurement
Intuitive parameter definition with automatic matched measurement.
Customer Standard Updates
Hard to refresh, low timeliness
Manual re-measurement and turnaround takes days.
Instant refresh
Change measurement standards easily and refresh in minutes.
Multi-Person Collaboration
Subjective differences, poor repeatability
Measurement approaches vary and results depend on operator.
Consistent, repeatable results
Automated analysis that does not depend on the operator.
Process Information Sharing
Hard to reuse, low utilization
Knowledge stays with individuals and expensive data cannot flow.
Information on demand
Extract key information when needed, not tied to a single person.

Ready to Automate Process Measurement?

Contact our team to see how Emit PE can accelerate measurement, improve repeatability, and scale best practices across teams.

Request a Demo